Plasma-assisted atomic layer deposition of metal oxides and nitrides
Part A – Introduction. Chapter 1. Framework And Overview Of The Research. 1. Part B – Publications. Chapter 2. Plasma Assisted Atomic Layer Deposition Of TiN , Download PDF file of Plasma-assisted atomic layer deposition of metal oxides and nitrides, Published originally in 2008. This PDF file has 168 Pages pages and the PDF file size is 5.34 MB. The PDF file is written in English, Categorized in . As of 11 January 2025, this page has been bookmarked by 0 people. Now You Can Download "Plasma-assisted atomic layer deposition of metal oxides and nitrides Book" as PDF or You Can See Preview By Clicking Below Button.
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